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Browsing by Author "Armour, D.G>"

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    High resolution, quantitative depth profiling analysis of nm thin hgh-k dielectriclayers using medium energy ion scattering (MEIS)

    van den Berg, J.A.
    ;
    Reading, M.A.
    ;
    Armour, D.G>
    ;
    Bailey, P.
    ;
    Noakes, T.C.Q.
    ;
    Conard, Thierry  
    Proceedings paper
    2009, 19th Ion Beam Analysis Conference - IBA, 7/09/2009

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