Browsing by Author "Arstila, K."

Now showing 1 - 2 of 2

Characterization of high and low dielectrica using low Energy Time of Flight Elastic Recoil Detection

Brijs, Bert
;
Sajavaara, T.
;
Giangrandi, Simone
;
Arstila, K.
Journal article
2005, Microelectronic Engineering, 80, p.106-109
The analysis of a thin SiO2/SixN1-x/SiO2 stack, a comparative study of low energy ERD with XPS, low energy SIMS, HRBS, HR-ERD

Brijs, Bert
;
Giangrandi, Simone
;
Arstila, K.
;
Bergmaier, A.
;
Kimura, K.
;
Conard, Thierry
Oral presentation
2005, 17th International Conference on Ion Beam Analysis