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Browsing by Author "Atsuko, Yamaguchi"

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    Publication

    Precise measurement of thin film thickness in 3D-NAND device with CD-SEM

    Ohashi, Takeyoshi
    ;
    Atsuko, Yamaguchi
    ;
    Kobayashi, Takashi
    ;
    Inoue, Osamu
    ;
    Hasumi, Kazuhisa
    Oral presentation
    2016, 42nd Micro and Nano Engineering Conference

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