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Browsing by Author "Augustin, M."

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    Impact of LER on BEOL dielectric reliability: a quantitative model and experimental validation

    Tokei, Zsolt  
    ;
    Roussel, Philippe  
    ;
    Stucchi, Michele  
    ;
    Versluijs, Janko  
    ;
    Ciofi, Ivan  
    Proceedings paper
    2009, IEEE International Interconnect Technology Conference - IITC, 1/06/2009, p.228-230

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