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Browsing by Author "Bĝggild, Peter"

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    Electrical characterization of InGaAs ultra-shallow junctions

    Petersen, Dirch H.
    ;
    Hansen, Ole
    ;
    Bĝggild, Peter
    ;
    Lin, Rong
    ;
    Nielsen, Peter F.
    ;
    Lin, Dennis  
    Journal article
    2010, Journal of Vacuum Science and Technology B, (28) 1, p.C1C41-C1C47

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