Browsing by Author "Badylevich, M"
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Publication Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes
Journal article2009, Journal of Applied Physics, (106) 9, p.94101Publication Energy barriers at interfaces of 100GaAs with atomic layer deposited Al2O3 and HfO2
Journal article2008, Applied Physics Letters, (93) 21, p.212104