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Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes
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1973 since deposited on 2021-10-18
Acq. date: 2025-10-24
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1973 since deposited on 2021-10-18
Acq. date: 2025-10-24
Citations