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Composition influence on the physical and electrical properties of SrxTi1-xOy-based MIM capacitors prepared by Atomic Layer Deposition using TiN bottom electrodes
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1979 since deposited on 2021-10-18
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Acq. date: 2026-02-27
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1979 since deposited on 2021-10-18
1last month
1last week
Acq. date: 2026-02-27
Citations