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Browsing by Author "Baeyens, Jonas"

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    Influence of photoresist and BARC selection on the efficiency of a post-etch wet strip in BEOL applications

    Kesters, Els  
    ;
    Lux, Marcel  
    ;
    Pittevils, Joris
    ;
    Baeyens, Jonas
    ;
    Vereecke, Guy  
    ;
    Struyf, Herbert  
    Meeting abstract
    2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS, 20/09/2010, p.56-57

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