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Browsing by Author "Baklanov, M.R."

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    Influence of porosity on electrical properties of low-k dielectrics irradiated with vacuum-ultraviolet radiation

    Choudhury, F.A.
    ;
    Nguyen, H.M.
    ;
    Baklanov, M.R.
    ;
    de Marneffe, Jean-Francois  
    ;
    Li, W.
    ;
    Pei, D.
    Journal article
    2016, Applied Physics Letters, (109) 12, p.122902

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