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Browsing by Author "Bal, Stef"

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    Pattern collapse of high-aspect-ratio silicon nanostructures - A parametric study

    Vrancken, Nandi  
    ;
    Vereecke, Guy  
    ;
    Bal, Stef
    ;
    Sergeant, Stefanie  
    ;
    Doumen, Geert  
    ;
    Holsteyns, Frank  
    Proceedings paper
    2016, Ultra Clean Processing of Semiconductor Surfaces XIII - UCPSS, 11/09/2016, p.136-140

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