Browsing by Author "Banerjee, Souvik"
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Publication Impact of CO2 cryogenic pre-treatment on ion impanted photresist wet cleaning
Proceedings paper2008, Sematech Surface Preparation and Cleaning conference, 31/03/2008Publication Stripping of ion implanted photoresist by Co2 cryogenic pre-treatment followed by wet cleaning
Oral presentation2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS