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Browsing by Author "Banerjee, Souvik"

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    Impact of CO2 cryogenic pre-treatment on ion impanted photresist wet cleaning

    Malhouitre, Stephane
    ;
    Vos, Rita  
    ;
    Banerjee, Souvik
    ;
    Bearda, Twan
    ;
    Mertens, Paul  
    Proceedings paper
    2008, Sematech Surface Preparation and Cleaning conference, 31/03/2008
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    Stripping of ion implanted photoresist by Co2 cryogenic pre-treatment followed by wet cleaning

    Malhouitre, Stephane
    ;
    Vos, Rita  
    ;
    Banerjee, Souvik
    ;
    Bearda, Twan
    ;
    Mertens, Paul  
    Oral presentation
    2008, 9th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS

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