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Conference contributions
Impact of CO2 cryogenic pre-treatment on ion impanted photresist wet cleaning
Publication:
Impact of CO2 cryogenic pre-treatment on ion impanted photresist wet cleaning
Date
2008
Proceedings Paper
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17840.pdf
735.19 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Malhouitre, Stephane
;
Vos, Rita
;
Banerjee, Souvik
;
Bearda, Twan
;
Mertens, Paul
Journal
Abstract
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1868
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1868
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations