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Browsing by Author "Baranov, Gleb"

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    Roughness study of a template for hetero-integrated FinFET

    Baranov, Gleb
    ;
    Milenin, Alexey  
    ;
    Baklanov, Mikhaïl
    Meeting abstract
    2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015
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    Study of LER as a function of Si fin etching step in replacement FinFET process (title translated).

    Baranov, Gleb
    ;
    Milenin, Alexey  
    ;
    Baklanov, Mikhaïl
    Journal article
    2016, Mikroelektronika (rus), (45) 3, p.1-6

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