Browsing by Author "Baranov, Gleb"
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Publication Roughness study of a template for hetero-integrated FinFET
Meeting abstract2015, Plasma Etch and Strip in Microtechnology - PESM, 27/04/2015Publication Study of LER as a function of Si fin etching step in replacement FinFET process (title translated).
Journal article2016, Mikroelektronika (rus), (45) 3, p.1-6