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Browsing by Author "Barbosa Lima, Lucas Petersen"

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    A novel self-aligned double patterning integrated with Ga+ focused ion beam milling for silicon nanowire definition

    Rosa, Andressa Macedo
    ;
    Leonhardt, Alessandra  
    ;
    de Souza, Lais Oliveira
    Journal article
    2021, MICROELECTRONIC ENGINEERING, 237, p.111493

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