Browsing by Author "Barla, K."
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Publication Micro-Raman spectroscopy evaluation of the local mechanical stress in shallow trench isolation CMOS structures: correlation with defect generation and diode leakage
; ; Publication Simulation of mechanical stresses during shallow trench isolation process
Proceedings paper1998, Proceedings of the 28th European Solid-State Device Research Conference - ESSDERC'98; 8-10 Sept. 1998; Bordeaux, France., p.120-123