Browsing by Author "Barozzi, Mario"
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Publication TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM
Journal article2013, Surface and Interface Analysis, (45) 1, p.394-397Publication TiN/STO/TiN MIMcaps nanolayers on silicon characterized by SIMS and AFM
Meeting abstract2011, 18th International Conference on Secondary Ion Mass Spectrometry - SIMS XVIII, 18/09/2011