Browsing by Author "Barry, Kelly"

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3D Contact hole metrology accuracy and stability

Storms, Greet
;
Barry, Kelly
;
Cheng, Shaunee
Proceedings paper
2005, Interface, 24/10/2005
90nm technology contact CD performance characterization via ODP scatterometry

Barry, Kelly
;
Cheng, Shaunee
;
Storms, Greet
Proceedings paper
2005, Metrology, Inspection, and Process Control for Microlithography XIX, 27/02/2005, p.140-143
Metrology accuracy and stability: the fundamental baseline for process monitoring and control

Storms, Greet
;
Barry, Kelly
;
Cheng, Shaunee
Proceedings paper
2005, AEC/APC -Asia Symposium, 1/12/2005