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Browsing by Author "Bauer, Frank"

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    Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis

    Conard, Thierry  
    ;
    Arstila, Kai
    ;
    Hantschel, Thomas  
    ;
    Franquet, Alexis  
    ;
    Vandervorst, Wilfried  
    Proceedings paper
    2009, Electron Crystallography for Materials Research and Quantitative Characterization of Nanostructured Materials, 13/04/2009, p.HH08-08

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