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Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis
Publication:
Composition quantification of microelectronics multilayer thin films by EDX: toward small scale analysis
Date
2009
Proceedings Paper
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18003.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
Arstila, Kai
;
Hantschel, Thomas
;
Franquet, Alexis
;
Vandervorst, Wilfried
;
Vecchio, Emma
;
Bauer, Frank
;
Burgess, Simon
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Views
1975
since deposited on 2021-10-17
Acq. date: 2025-10-27
Citations
Metrics
Views
1975
since deposited on 2021-10-17
Acq. date: 2025-10-27
Citations