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Browsing by Author "Bauer, Thomas"

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    Further optimization of plasma nitridation of ultra-thin oxides for 65 nm node MOSFETS

    Kraus, Philip
    ;
    Chua, Tai Chen
    ;
    Rothschild, Aude
    ;
    Cubaynes, Florence
    ;
    Veloso, Anabela  
    Proceedings paper
    2004, Advanced Short-Time Thermal Processing for Si-based CMOS Devies II, 9/05/2004, p.236-243

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