Publication:
Further optimization of plasma nitridation of ultra-thin oxides for 65 nm node MOSFETS
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2041 since deposited on 2021-10-15
Acq. date: 2026-05-17
Citations
Statistics
Views
2041 since deposited on 2021-10-15
Acq. date: 2026-05-17
Citations