Publication:
Further optimization of plasma nitridation of ultra-thin oxides for 65 nm node MOSFETS
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
2040 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-03-17
Citations
Statistics
Views
2040 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-03-17
Citations