Browsing by Author "Baylav, Burak"
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Publication EUV flare and proximity modeling and model-based correction
Proceedings paper2011, Extreme Ultraviolet (EUV) Lithography II, 27/02/2011, p.79690SPublication Mitigating mask roughness via pupil filtering
Proceedings paper2014, Optical Microlithography XXVII, 23/02/2014, p.90521OPublication The impact of pupil plane filtering on mask roughness transfer
Journal article2013, Journal of Vacuum Science and Technology B, (31) 6, p.06F801