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The impact of pupil plane filtering on mask roughness transfer
Publication:
The impact of pupil plane filtering on mask roughness transfer
Date
2013
Journal article
Simple item page
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27537.pdf
1.8 MB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Baylav, Burak
;
Maloney, Chris
;
Levinson, Zac
;
Bekaert, Joost
;
Vaglio Pret, Alessandro
;
Smith, Bruce W.
Journal
Journal of Vacuum Science and Technology B
Abstract
Description
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1816
since deposited on 2021-10-21
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item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1816
since deposited on 2021-10-21
401
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations