Browsing by Author "Beanland, R."
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Publication Material optimisation for AlGaN/GaN HFET applications
Journal article2001, Journal of Crystal Growth, (230) 3_4, p.573-578Publication Optimization of polysilicon encapsulated local oxidation of silicon
Journal article1998, Journal of the Electrochemical Society, (145) 5, p.1653-1659Publication Optimization of polysilicon encapsulated LOCOS for 0.25 micron CMOS: correlation between cavity dimensions, mechanical stress, and gate oxide integrity
Proceedings paper1997, ULSI Science and Technology 1997, 5/05/1997, p.467-477Publication Simulation of advanced-LOCOS capability for sub-0.25 micron CMOS isolation