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Optimization of polysilicon encapsulated LOCOS for 0.25 micron CMOS: correlation between cavity dimensions, mechanical stress, and gate oxide integrity
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1926 since deposited on 2021-09-30
Acq. date: 2025-12-10
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1926 since deposited on 2021-09-30
Acq. date: 2025-12-10
Citations