Browsing by Author "Beanland, R. J."
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Publication Characterisation of mechanical stresses of device isolation structures by micro-Raman spectroscopy and modelling
;Jones, S. K. ;Ahmed, M. ;Bazley, D. J. ;Beanland, R. J.; ;Hill, C.Rothwell, W. J.Proceedings paper1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.60-75