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Browsing by Author "Beanland, R. J."

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    Characterisation of mechanical stresses of device isolation structures by micro-Raman spectroscopy and modelling

    Jones, S. K.
    ;
    Ahmed, M.
    ;
    Bazley, D. J.
    ;
    Beanland, R. J.
    ;
    De Wolf, Ingrid  
    ;
    Hill, C.
    ;
    Rothwell, W. J.
    Proceedings paper
    1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.60-75

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