Browsing by Author "Beaufort, M.F."
Now showing 1 - 4 of 4
- Results per page
- Sort Options
Publication Comparison of defects created by plasma-based ion implantation and conventional implantation of hydrogen in germanium
Proceedings paper2008, Gettering and Defect Engineering in Semiconductor Technology XII, 14/10/2007, p.101-106Publication Defects created by plasma immersion ion implantation of hydrogen in germanium
Oral presentation2007, MRS Spring Meeting Symposium F: Semiconductor Defect Engineering - Materials, Synthesis, Structures and Devices IIPublication Extended defects created by helium implantation at different temperature in germanium
Oral presentation2008, International Conference on Extended Defects in Semiconductors - EDSPublication Extended defects created by light ion implantation in Germanium