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Browsing by Author "Beaven, Peter"

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    Grazing incidence X-ray fluorescence spectrometry for compositional analysis of nanometer-thin high-k dielectric HfO2 layers

    Hellin, David  
    ;
    Delabie, Annelies  
    ;
    Puurunen, Riikka
    ;
    Beaven, Peter
    ;
    Conard, Thierry  
    ;
    Brijs, Bert
    Journal article
    2005-07, Analytical Sciences, (21) 7, p.845-850

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