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Browsing by Author "Becker, L."

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    Epitaxial Growth of Active Si on Top of SiGe Etch Stop Layer in View of 3D Device Integration

    Becker, L.
    ;
    Storck, P.
    ;
    Loo, Roger  
    ;
    Jourdain, Anne  
    ;
    Rengo, Gianluca  
    ;
    Porret, Clément  
    Journal article
    2021, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, (10) 1, p.014001

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