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Browsing by Author "Beckhoff, Buckard"

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    Advanced metrologies for cleans characterization: ARXPS, GIXF and NEXAFS

    Conard, Thierry  
    ;
    List, Scott
    ;
    Claes, Martine  
    ;
    Beckhoff, Buckard
    Proceedings paper
    2008, Ultra Clean Processing of Semiconductor Surfaces VIII - UCPSS, 18/09/2006, p.281-284

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