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Conference contributions
Advanced metrologies for cleans characterization: ARXPS, GIXF and NEXAFS
Publication:
Advanced metrologies for cleans characterization: ARXPS, GIXF and NEXAFS
Date
2008
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Conard, Thierry
;
List, Scott
;
Claes, Martine
;
Beckhoff, Buckard
Journal
Abstract
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1889
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations
Metrics
Views
1889
since deposited on 2021-10-17
Acq. date: 2025-10-23
Citations