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Browsing by Author "Beeman, J.W."

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    Implantation and activation of phosphorus in amorphous and crystalline germanium layers

    Lieten, Ruben  
    ;
    Douhard, Bastien  
    ;
    Stesmans, Andre  
    ;
    Jivanescu, M
    ;
    Beeman, J.W.
    ;
    Simoen, Eddy  
    Journal article
    2013, ECS Journal of Solid State Science and Technology, (2) 9, p.P346-P350

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