Browsing by Author "Belmiloud, Naser"
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Publication Dynamics of the defects left by a residual droplet on photoresist-coated substrates
Meeting abstract2012, Sematech Surface Preparation and Cleaning Conference - SPCC, 19/03/2012Publication Dynamics of the drying defects left by residual ultra-pure water droplets on silicon substrate
Journal article2012, ECS Journal of Solid State Science and Technology, (1) 1, p.P34-P39Publication Effect of the surface/water chemistry on the creation of watermarks
Meeting abstract2012, 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS, 16/09/2012Publication Effect of the surface/water chemistry on the creation of watermarks
Proceedings paper2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.227-230Publication Evaluation of high-speed linear air-knife based wafer dryer
Meeting abstract2012, 11th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS, 16/09/2012, p.6.5Publication Evaluation of high-speed linear air-knife based wafer dryer
Proceedings paper2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.239-242Publication Investigation on the drying dynamics of millimetric water droplets: source of watermarks on silicon wafers
Proceedings paper2011, Semiconductor Cleaning Science and Technology 12 - SCST12, 9/10/2011, p.205-212Publication Investigation on the drying dynamics of millimetric water droplets: source of watermarks on silicon wafers
Meeting abstract2011, 220th ECS Meeting Symposium E7: Semiconductor Cleaning Science and Technology 12, 9/10/2011, p.2059Publication Leaching and drying marks on photoresist-coated substrates
Journal article2014, Microelectronic Engineering, 114, p.131-135