Publication:

Leaching and drying marks on photoresist-coated substrates

Date

2014

Journal article

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Author(s)

Belmiloud, Naser

;

Tamaddon, Amir-Hossein

;

;

Struyf, Herbert

Journal

Microelectronic Engineering

Metrics

1948 since deposited on 2021-10-22

Acq. date: 2025-12-15