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Browsing by Author "Belov, Igor"

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    Low temperature SiCN as dielectric for hybrid bonding

    Channam, Venkat Sunil Kumar  
    ;
    Iacovo, Serena  
    ;
    Walsby, Edward
    ;
    Belov, Igor
    ;
    Jourdain, Anne  
    Proceedings paper
    2023, 7th IEEE Electron Devices Technology and Manufacturing Conference (EDTM), MAR 07-10, 2023

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