Browsing by Author "Belov, N."

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CMOS-integrated poly-SiGe cantilevers with read/write system for probe storage device

Severi, Simone
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Heck, J.
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Chou, T.K.A.
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Belov, N.
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Park, J.S.
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Harrar, D.
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Jain, A.
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Van Hoof, Rita
Proceedings paper
2009, Transducers. 15th International Conference on Solid-State Sensors, Actuators and Microsystems, 21/06/2009, p.2409-2412
Silicon tip formation by isotropic SF6/HBr based dry etching

Kunnen, Eddy
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Severi, Simone
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Verheyen, Peter
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Dupont, Tania
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Van Hoof, Rita
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Vleugels, Frank
Meeting abstract
2009, 2nd International Workshop on Plasma Etch and Strip in Microelectronics - PESM, 26/02/2009