Publication:

CMOS-integrated poly-SiGe cantilevers with read/write system for probe storage device

Date

2009
Proceedings Paper
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Author(s)

Severi, Simone  
;
Heck, J.
;
Chou, T.K.A.
;
Belov, N.
;
Park, J.S.
;
Harrar, D.
;
Jain, A.
;
Van Hoof, Rita  
;
Du Bois, Bert  
;
De Coster, Jeroen  
;
Varela Pedreira, Olalla  
;
Willegems, Myriam  
;
Vaes, Jan
;
Jamieson, Geraldine  
;
Haspeslagh, Luc  
;
Adams, D.
;
Rao, V.
;
Decoutere, Stefaan  
;
Witvrouw, Ann

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1936 since deposited on 2021-10-18
Acq. date: 2025-10-23

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1936 since deposited on 2021-10-18
Acq. date: 2025-10-23

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