Browsing by Author "Bender, Markus"
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Publication Enabling Curvilinear Masks: Novel Mask Qualification Methodology and Experimental Verification
Proceedings paper2025, Photomask Technology, 2025-09-22, p.136870MPublication Lifetime test on EUV photomask with EBL2
Proceedings paper2019-05, Photomask Japan 2019: XXVI Symposium on Photomask and Next-Generation Lithography Mask Technology, 16/04/2019, p.111780E