Publication:

Lifetime test on EUV photomask with EBL2

Date

2019-05

Proceedings Paper

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Author(s)

Wu, Chien-ching

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;

Jonckheere, Rik

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;

;

van Putten, Michel

;

de Zanger, Rory

;

;

Westerhout, Jeroen

;

;

van Veldhoven, Jacqueline

;

de Rooij-Lohmann, Veronique

;

;

Metrics

2099 since deposited on 2021-10-27

Acq. date: 2025-12-11