Browsing by Author "Bennett, Nick"
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Impact of multiple sub-melt laser scans on the activation and diffusion of shallow Boron junctions
Proceedings paper2008, 16th IEEE International Conference on Advanced Thermal Processing of Semiconductors - RTP, 30/09/2008, p.135-140Publication Review of electrical characterization of ultra-shallow junctions with micro four-point probes