Publication:

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Date

2010
Journal article
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19475.pdf 487.93 KB

Author(s)

Petersen, Dirch
;
Hansen, Ole
;
Hansen, Torben
;
Boggild, Peter
;
Lin, Rong
;
Kjaer, Daniel
;
Nielsen, Peter F.
;
Clarysse, Trudo
;
Vandervorst, Wilfried  
;
Rosseel, Erik  
;
Bennett, Nick
;
Cowern, Nick

Journal

Journal of Vacuum Science and Technology B

Abstract

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