Browsing by Author "Bennett, Nick S."
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Publication Review of electrical characterization of ultra-shallow junctions with micro four-point probes
;Petersen, Dirch H. ;Hansen, Ole ;Hansen, Torben M. ;Boggild, Peter ;Lin, RongKjaer, DanielProceedings paper2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009