Repository logo Institutional repository
  • Communities & Collections
  • Browse
  • Site
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Bennett, Nick S."

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results Per Page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Review of electrical characterization of ultra-shallow junctions with micro four-point probes

    Petersen, Dirch H.
    ;
    Hansen, Ole
    ;
    Hansen, Torben M.
    ;
    Boggild, Peter
    ;
    Lin, Rong
    ;
    Kjaer, Daniel
    Proceedings paper
    2009, International Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling, 26/04/2009

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings