Publication:

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Date

2009

Proceedings Paper

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Author(s)

Petersen, Dirch H.

;

;

Hansen, Torben M.

;

;

;

;

Nielsen, Peter F.

;

Clarysse, Trudo

;

Vandervorst, Wilfried

;

;

Bennett, Nick S.

;

Cowern, Nick E.B.

Statistics

1943 since deposited on 2021-10-18

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Acq. date: 2026-05-17