Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Publication:

2009

Proceedings Paper

Author(s)

Petersen, Dirch H.

;

Hansen, Ole

;

Hansen, Torben M.

;

Boggild, Peter

;

Lin, Rong

;

Kjaer, Daniel

;

Nielsen, Peter F.

;

Clarysse, Trudo

;

;

;

Bennett, Nick S.

;

Cowern, Nick E.B.

1945 since deposited on 2021-10-18

Acq. date: 2026-10-10