Review of electrical characterization of ultra-shallow junctions with micro four-point probes

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Author(s)

Petersen, Dirch H.

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;

Hansen, Torben M.

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;

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Nielsen, Peter F.

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Clarysse, Trudo

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Vandervorst, Wilfried

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Bennett, Nick S.

;

Cowern, Nick E.B.

Metrics

1935 since deposited on 2021-10-18

Acq. date: 2025-10-23