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Review of electrical characterization of ultra-shallow junctions with micro four-point probes

Date

2009
Proceedings Paper
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dc.contributor.authorPetersen, Dirch H.
dc.contributor.authorHansen, Ole
dc.contributor.authorHansen, Torben M.
dc.contributor.authorBoggild, Peter
dc.contributor.authorLin, Rong
dc.contributor.authorKjaer, Daniel
dc.contributor.authorNielsen, Peter F.
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorRosseel, Erik
dc.contributor.authorBennett, Nick S.
dc.contributor.authorCowern, Nick E.B.
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorRosseel, Erik
dc.date.accessioned2021-10-18T01:40:14Z
dc.date.available2021-10-18T01:40:14Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16011
dc.source.conferenceInternational Workshop on INSIGHT in Semiconductor Device Fabrication, Metrology and Modeling
dc.source.conferencedate26/04/2009
dc.source.conferencelocationNapa, CA USA
dc.title

Review of electrical characterization of ultra-shallow junctions with micro four-point probes

dc.typeProceedings paper
dspace.entity.typePublication
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