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Browsing by Author "Bensahel, D."

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    Low thermal budget Si epitaxy: an overview study of the substrate/epi interface in a number of common epitaxial growth systems

    Caymax, Matty  
    ;
    Vescan, L.
    ;
    Werner, K.
    ;
    Bensahel, D.
    ;
    Gravensteijn, D.
    ;
    Szendro, I.
    Proceedings paper
    1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.83-86

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