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Low thermal budget Si epitaxy: an overview study of the substrate/epi interface in a number of common epitaxial growth systems
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1942 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-09
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Metrics
Views
1942 since deposited on 2021-09-29
1last month
Acq. date: 2025-12-09
Citations