Publication:

Low thermal budget Si epitaxy: an overview study of the substrate/epi interface in a number of common epitaxial growth systems

Date

1996
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorCaymax, Matty
dc.contributor.authorVescan, L.
dc.contributor.authorWerner, K.
dc.contributor.authorBensahel, D.
dc.contributor.authorGravensteijn, D.
dc.contributor.authorSzendro, I.
dc.contributor.imecauthorCaymax, Matty
dc.date.accessioned2021-09-29T14:18:31Z
dc.date.available2021-09-29T14:18:31Z
dc.date.embargo9999-12-31
dc.date.issued1996
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1112
dc.source.beginpage83
dc.source.conferenceProceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
dc.source.conferencedate23/09/1996
dc.source.conferencelocationAntwerpen Belgium
dc.source.endpage86
dc.title

Low thermal budget Si epitaxy: an overview study of the substrate/epi interface in a number of common epitaxial growth systems

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
1089.pdf
Size:
161.42 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions