Browsing by Author "Bergman, E."
Now showing 1 - 5 of 5
- Results per page
- Sort Options
Publication Evaluation of ozonated water spray for resist cleaning applications
Meeting abstract1999, Electrochemical Society Fall Meeting: 6th International Symposium on Cleaning Technology in Semiconductor Device Manufacturing, 17/10/1999, p.1116Publication Evaluation of ozonated water spray for resist cleaning applications
Proceedings paper2000, Cleaning Technology in Semiconductor Device Manufacturing. Proceedings of the 6th International Symposium, 17/10/1999, p.391-398Publication Making the cleaner greener
Publication Ozonated HF applications in a spray processing tool
Meeting abstract2001, 200th Meeting of the Electrochemical Society: 7th International Symposium on Cleaning Technology in Semiconductor Device Manufac, 2/09/2001Publication Ozonated HF applications in a spray processing tool
Proceedings paper2002, Cleaning Technology in Semiconductor Device Manufacturing VII, 4/09/2001, p.314-321