Publication:

Evaluation of ozonated water spray for resist cleaning applications

Date

1999

Meeting abstract

Simple item page Full metadata Statistics

Files

3316.pdf 314.63 KB

Author(s)

De Gendt, Stefan

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;

;

;

Van Hoeymissen, Jan

;

Lagrange, Sébastien

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;

;

Metrics

1886 since deposited on 2021-10-06

Acq. date: 2025-12-09