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Browsing by Author "Bermaier, A."

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    Characterization of ultra thin oxynitrides: a general approach

    Brijs, Bert
    ;
    Deleu, Jeroen
    ;
    Conard, Thierry  
    ;
    De Witte, Hilde
    ;
    Vandervorst, Wilfried  
    ;
    Nakajima, K.
    Journal article
    2000, Nuclear Instruments and Methods B, 161-163, p.429-434

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